Benefits of Mentor Graphics' Calibre LFD Demonstrated by Infineon-Chartered Collaboration
30 5์ 2007 - 10:00PM
Business Wire
Mentor Graphics Corporation (Nasdaq:MENT) today announced it has
validated Calibre๏ฟฝ LFD (litho-friendly design) results in silicon
on 65nm process technology. A joint paper by Infineon Technologies
and Chartered Semiconductor Manufacturing documents the positive
results that can be achieved by implementing a lithographic process
verification flow using Mentor Graphics๏ฟฝ Calibre LFD. Calibre LFD
allows a design rule check (DRC) clean cell-based design to be
analyzed for manufacturability by simulating the effects of
real-world lithographic process variations. It is used early in
design creation to identify lithography ๏ฟฝhot spots๏ฟฝ that can lead
to a higher incidence of defects. Calibre LFD uses production
process models that provide the level of accuracy required to make
modifications with confidence. Chartered has been collaborating
with Mentor to provide an LFD๏ฟฝ production kit since March 2006. The
paper entitled ๏ฟฝHardware Verification of Litho-Friendly Design
(LFD) Methodologies [6521-20]๏ฟฝ was presented in February 2007 at
the SPIE Advanced Lithography Symposium and put together by a joint
team from Infineon and Chartered (Reinhard M๏ฟฝrz, Kai Peter, Sonja
Gr๏ฟฝndahl, and Klaus Keiner of Infineon Technologies AG; and Byoung
Il Choi, Shyue Fong Quek, Mei Chun Yeo, Nan Shu Chen, and Soo Muay
Goh of Chartered). The paper๏ฟฝs conclusions are based on a series of
experiments designed to prove the value of implementing LFD
model-based physical verification in addition to traditional
rule-based design when moving to 65nm and smaller geometries. The
experiments included lithography checks for Minimum Width
(Pinching), Minimum Space (Bridging), Minimum Area Overlap, and
Process Variability Index. Physical measurements on real test
wafers processed with controlled dose and focus parameter
variations were found to correlate closely with the LFD
simulations. The experiments were run on an Infineon standard cell
library manufactured in Chartered๏ฟฝs Fab 7. ๏ฟฝIt was important to
prove the value of model-based lithography simulation capability by
comparing simulated results to measurements of real test die
produced on 65nm process,๏ฟฝ said Walter Ng, senior director of
platform alliances at Chartered. ๏ฟฝThis work using Infineon๏ฟฝs
standard cell library demonstrates that a highly accurate LFD flow
for our 65nm process can provide substantial benefits for our
customers.๏ฟฝ The SPIE paper concludes that DRC compliance alone is
not sufficient to avoid hot spots that can affect yield at 65nm and
below. The researchers also found that most hot spots could be
attributed to a small number of cells. This suggests that
significant yield improvements can be obtained by modifying a
relatively small number of layout hot spots when these are ranked
by severity and yield impact. ๏ฟฝWe are very gratified to see
Infineon and Chartered leading the way to validate the LFD
methodology,๏ฟฝ said Joe Sawicki, vice president and general manager,
Design to Silicon Division, Mentor Graphics. ๏ฟฝWe believe the
results of this work should be of high interest to other companies
who are currently evaluating the benefits of different DFM
solutions, and are working on implementing an LFD-based
verification flow.๏ฟฝ About Mentor Graphics Mentor Graphics
Corporation (Nasdaq:MENT) is a world leader in electronic hardware
and software design solutions, providing products, consulting
services and award-winning support for the world๏ฟฝs most successful
electronics and semiconductor companies. Established in 1981, the
company reported revenues over the last 12 months of about $800
million and employs approximately 4,200 people worldwide. Corporate
headquarters are located at 8005 S.W. Boeckman Road, Wilsonville,
Oregon 97070-7777. World Wide Web site: http://www.mentor.com/.
Mentor Graphics and Calibre are registered trademarks and LFD is a
trademark of Mentor Graphics Corporation. All other company or
product names are the registered trademarks or trademarks of their
respective owners.
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